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Three Stage TEOS Traps
The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Pfeiffer Vacuum Valve & Engineering's three stage trap contains a stainless steel gauze filter, a 10 micron particulate filter and a generous liquid reservoir. This allowing solids to form, prevents small particles from moving down line, and holds large amounts of liquid. .
Three Stage TEOS Traps Features
- Collects particles >10 microns
- Easy filter replacement
- First stage - Stainless steel gauze filter
- Right angle or coaxial design
- Second stage - 10 micron fiberglass filter
- Third stage - Large reservoir to collect any liquid TEOS
Since its founding in 1962, Nor-Cal Products, Inc dba Pfeiffer Vacuum Valves & Engineering has been designing and building standard and custom foreline traps for the vacuum industry. These traps range in complexity from simple sealed coaxial traps designed to prevent oil backstreaming, to the triple-pass water cooled traps, which remove condensable gasses that contaminate mechanical pump oil or other parts of the system. Except for the permanently sealed one-piece body coaxial models, all Pfeiffer Vacuum Valve & Engineering's traps disassemble easily with a FKM O-ring and V-clamp. The two piece body allows for easy removal for cleaning or replacement. Standard finish for all traps is beadblast. Electropolish finish is available on request.
