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Single Stage TEOS Traps
Nor-Cal’s LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our single stage trap contains a huge stainless steel gauze filter allowing solids to form inside the trap instead of the line. .
Single Stage TEOS Traps Features
- Collects crystalline TEOS and large particles
- Easy filter replacement
- Large stainless steel gauze filter
- Right angle or coaxial body designs
Since its founding in 1962, Nor-Cal Products has been designing and building standard and custom foreline traps for the vacuum industry. These traps range in complexity from simple sealed coaxial traps designed to prevent oil backstreaming, to the triple-pass water cooled traps, which remove condensable gasses that contaminate mechanical pump oil or other parts of the system. Except for the permanently sealed one-piece body coaxial models, all Nor-Cal traps disassemble easily with a FKM O-ring and V-clamp. The two piece body allows for easy removal for cleaning or replacement. Standard finish for all traps is beadblast. Electropolish finish is available on request.
