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Viewport Shutters

Viewport shutters are normally installed on a vacuum chamber CF flange behind a viewport. The shutter serves to shield the viewport surface and prevent the build-up of deposition materials. The shutter plate opens a full 90° by rotating the supplied all metal rotary motion feedthrough and may be locked in position with a locking screw.
 

Viewport Shutters Features

  • 10⁻¹⁰ torr range
  • 304 SS flange material
  • CF flange sizes available 2.75 to 8 inches
  • Maximum bakeout temperature 150°C
 
Nor-Cal Products manufactures shutters for viewport shielding. These shutters are mounted behind a viewport to prevent build-up of deposition materials on viewports while in the closed position. They use a single plate shutter with a 90° opening rotation. Nor-Cal Products’ design completely shields the viewing glass when the shutter is in the closed position. An integrated PRM-133 rotary motion feedthrough provides smooth actuation and a positive locking screw. Please call for custom actuation options, such as motor drives or special flanges.

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