Industrial LPCVD TEOS Multistage Foreline Traps
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Industrial LPCVD TEOS Multistage Foreline Traps Features
- 304 stainless construction
- Beadblast standard finish
- Electropolish on request
LPCVD TEOS Multistage Foreline Trap Features
Pfeiffer Vacuum Valves & Engineering LPCVD-TEOS traps are designed specifically to meet the demanding requirements of UHV pumping processes. All our TEOS traps effectively prevent oil vapor migration from your backing pump along the foreline. Additionally, TOES traps can save on maintenance time and costs by trapping condensable vapors from the chamber process. The two-piece trap body design and stainless steel construction allow these traps to be easily cleaned.Custom Single-Stage Trap, Two-Stage, and Multistage LPCVD TEOS Traps
Single-Stage TEOS Traps
The single-stage TEOS trap contains a large stainless steel gauze filter that collects crystalline TEOS before it reaches downstream piping and isolation valves. Additional features of the single-stage TEOS trap include:- Easy filter replacement
- Large stainless steel gauze filter
- Right angle or coaxial body designs
Two-Stage TEOS Traps
The second-stage TEOS trap contains a stainless steel gauze filter and a 10-micron fiberglass particulate filter. This two-stage TEOS trap removes silicon dioxide that causes frequent PM’s in throttling butterfly valves. This trap can prevent small particles from progressing in your pumping system and can also capture and store a small number of fluids. Additional features include:- Easy filter replacement
- Limited reservoir to collect liquid TEOS
- Right angle or coaxial design
Three-Stage TEOS Traps
The three-stage trap contains a stainless steel gauze filter, a 10-micron particulate filter, and a generous liquid reservoir. The three-stage design enables solids to form and prevents small particles from progressing in the vacuum system. Additionally, the liquid reservoir collects liquid TEOS without restricting foreline conductance. Features include:- Easy filter replacement
- Right angle or coaxial design
