Industrial LPCVD TEOS Multistage Foreline Traps

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Foreline traps connect your high-vacuum pump and backing pump or a chamber and roughing pump and are designed to eliminate unwanted oil vapor transfer. Nor-Cal Products’ offers both standard and customized LPCVD/TEO S multistage foreline traps. Our high-quality customized traps increase your system’s throughput and extend preventative maintenance intervals by 2X or more. Nor-Cal Products uses only the highest-grade materials to manufacture our multistage foreline traps. Our in-house tooling and equipment allows for faster turnaround time, lower costs, and full manufacturing supervision at each stage of our ISO 9001:2015-Certified trap manufacturing process.
 
To receive more information about Nor-Cal Products’ design and engineering expertise or to obtain a quote, please request a custom quote or contact us online.
 

Industrial LPCVD TEOS Multistage Foreline Traps Features

  • 304 stainless construction
  • Beadblast standard finish
  • Electropolish on request

LPCVD TEOS Multistage Foreline Trap Features

Nor-Cal Products’ LPCVD-TEOS traps are designed specifically to meet the demanding requirements of UHV pumping processes. All our TEOS traps are effective in preventing oil vapor migration from your backing pump along the foreline. Additionally, TOES traps can save on maintenance time and costs by trapping condensable vapors from the chamber process. The two-piece trap body design and stainless steel construction allow these traps to be easily cleaned.

Custom Single Stage Trap, Two Stage & Multistage LPCVD TEOS Traps

Single Stage TEOS Traps

The single stage TEOS trap contains a large stainless steel gauze filter that collects crystalline TEOS before it reaches downstream piping and isolation valves. Additional features of the single stage TEOS trap include:
  • Easy filter replacement
  • Large stainless steel gauze filter
  • Right angle or coaxial body designs

Two Stage TEOS Traps

The second stage TEOS trap contains a stainless steel gauze filter and a 10-micron fiberglass particulate filter. This two stage TEOS trap removes silicon dioxide that causes frequent PM’s in throttling butterfly valves. This trap is capable of preventing small particles from progressing in your pumping system and can also capture and store a small amount of fluids. Additional features include:
  • Easy filter replacement
  • Limited reservoir to collect liquid TEOS
  • Right angle or coaxial design

Three Stage TEOS Traps

The three stage trap contains a stainless steel gauze filter, a 10-micron particulate filter and a generous liquid reservoir. The three-stage design enables solids to form and prevents small particles from progressing in the vacuum system. Additionally, the liquid reservoir collects liquid TEOS without restricting foreline conductance. Features include:
  • Easy filter replacement
  • Right angle or coaxial design

Why Choose Nor-Cal For TEOS Foreline Traps

Nor-Cal Products, Inc. is dedicated to the continual improvement of our manufactured and purchased goods through the implementation of a carefully planned quality management system. We strive to meet our primary goal of 100% customer acceptance by manufacturing defect-free parts with on-time delivery, competitive pricing, and the best possible customer service. Our strong in-house capabilities support the quality of our components and services in a variety of areas, including:

Contact Nor-Cal For LPCVD TEOS Traps Vacuum Traps Today!

We look forward to serving your vacuum component needs! Request a custom quote online or contact us with any questions regarding our LPCVD TEOS vacuum traps.
 

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