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Two Stage TEOS Traps

The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Pfeiffer Vacuum Valve & Engineering's dual stage trap contains a stainless steel gauze filter and a 10 micron particulate filter allowing solids to form inside the trap and preventing the small particles from moving down line. It will also capture and hold a small amount of liquid.

Two Stage TEOS Traps Features

  • Collects particles >10 microns
  • Easy filter replacement
  • First stage - Stainless steel gauze filter
  • Limited reservoir to collect liquid TEOS
  • Right angle or coaxial design
  • Second stage - 10 micron fiberglass filter
Since its founding in 1962, Nor-Cal Products, Inc dba Pfeiffer Vacuum Valves & Engineering has been designing and building standard and custom foreline traps for the vacuum industry. These traps range in complexity from simple sealed coaxial traps designed to prevent oil backstreaming, to the triple-pass water cooled traps, which remove condensable gasses that contaminate mechanical pump oil or other parts of the system. Except for the permanently sealed one-piece body coaxial models, all Pfeiffer Vacuum Valve & Engineering's traps disassemble easily with a FKM O-ring and V-clamp. The two piece body allows for easy removal for cleaning or replacement. Standard finish for all traps is beadblast. Electropolish finish is available on request. 

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