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Custom Vacuum Chambers
Precision Vacuum Chambers for High and Ultra-High Vacuum Systems
Nor-Cal Products by Pfeiffer offers custom vacuum chambers and UHV manifolds engineered for research, industrial, and OEM applications. Manufactured in Yreka, California, these solutions are built to exact specifications using advanced fabrication technology and are backed by decades of vacuum expertise. Rigorous quality control ensures verified leak integrity, precise dimensional accuracy, and long-term reliability in high- and ultra-high vacuum environments. Nor-Cal offers custom design reviews to assure correct tolerances and design for proper fit, cost savings and in some cases shorter lead times.Request a quote for custom vacuum chambers, UHV manifolds, or precision vacuum components by completing our online form. Our team will follow up with a solution engineered to your specifications.
Custom Vacuum Chambers Features
- Stainless steel options: 304, 304L, 316, 316L
- Aluminum chambers available on request
- Stand-alone or complete assemblies with flanges, manipulators, viewports, and more
- Surface finishes: bead-blasted, electropolished, or chemically cleaned
- Helium leak tested to ≤ 1×10⁻⁹ mbar·L/sec
- CMM-inspected for dimensional accuracy; reports available
- Optional fiberglass wrapping for uniform bakeout and thermal distribution
Nor-Cal Vacuum Chamber Configuration Options
Spheres and Hemispheres
Spherical vacuum chambers, commonly used in UHV analyzer systems with a single target, are produced by welding together spun hemispheres available in a range of standard sizes. A large inlet/outlet port is typically welded to the bottom of the sphere, while multiple radial ports can be added around the chamber to accommodate load locks, gauges, and instrumentation.This offers several advantages over traditional cylindrical vacuum chambers with machined lids: they’re lighter, more cost-effective to manufacture, and provide less internal volume, which can improve vacuum performance. Spherical designs are ideal for custom UHV chamber fabrication where efficiency, space savings, and precise port placement are essential.
Cylindrical Vacuum Chambers
Cylindrical chamber bodies are available in a wide range of sizes and are fabricated from either welded tubing or rolled sheet metal. Base plates and lids can be constructed using die-formed dished heads, hemispheres, or blank flanges. Dished heads and hemispheres offer lighterweight and cost advantages over fully machined flanges.
This versatile configuration is commonly used in analyzer chambers with multiple levels or targets, as well as in processing chambers that incorporate carousels, robotic arms, or other internal mechanisms.
Rectangular Vacuum Chambers
Rectangular chambers are often selected for applications that demand enhanced accessibility, increased internal volume, or greater structural mass for vibration dampening. Their construction makes them ideal for high-spec applications where mechanical stability, internal space, and component access are critical.These chambers are typically fabricated from welded plate material or machined from solid billets, offering a high degree of customization. Depending on material thickness and span, stiffening bars may be added to maintain structural integrity under vacuum conditions.
Features and Application-Driven Designs
Water-Cooled Vacuum Chambers
Within the Nor-Cal Products offering, the Pfeiffer team in Northern California frequently produce water-cooled vacuum chambers for high-temperature applications such as diffusion, chemical vapor deposition (CVD), and other thermal vacuum processes. These chambers are typically constructed with either integrated water channels or a double-walled design, depending on thermal requirements and system configuration.Double-walled chambers are often preferred for their cost-efficiency and consistent thermal performance. Internal baffles are added to promote even water circulation, ensuring uniform internal temperatures. In contrast, water channel designs involve more manual fitting and may be used where precise thermal control is critical.
Nor-Cal water-cooled chambers undergo rigorous leak testing. Water cavities are pressure-tested with dry nitrogen, followed by helium leak detection. Helium is applied to all welds while the system is under vacuum to verify water-tight integrity.
