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Three Stage LPCVD-TEOS Traps

Part Number: FTT3S-8-4002-ISO
Quantity:
 

Features
  • Call us at 800-842-4166 to learn more about foreline contamination management
  • Choose a trap for particles, moisture, condensable chemicals or any combination thereof
  • Wide range of trap styles and techniques
ISO-100 Three Stage Coaxial LPCVD-TEOS Trap, 8" Body
Technical Resources
Specifications
  • Trap Type: LPCVD-TEOS Trap
  • Stage(s): Three (stainless gauze, fiberglass filter & catch pot)
  • Port Orientation: Coaxial
  • Flange Size / Type: DN 100 ISO-K
  • Trap Body Size: 8" OD
  • Body Material: 304 Stainless
  • Vacuum Range: 1 · 10-8 mbar to 1 bar
  • Temperature Range: -20 °C to 180 °C
  • Weight: 17 lbs
TEOS-Coaxial-Dia
Imperial Units
Dim A: 19.1"
Dim C: 8"
Dim D: 9.45"

Installation Hardware

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