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Product Catalogs and Support Documentation

General

Nor-Cal Products Catalog 2019

Nor-Cal_Products_2019 Online_Catalog  (File Size 45.29 M)

Download the most recent catalog from Nor-Cal Products.  This resource catalog contains dimensions, and operating information on over 6000 standard components as well as engineering and manufacturing capabilities for custom chambers and other custom components.  It is a great resource to assist with online ordering or calling 1-800-824-4166 to place your order with our friendly customer care representatives.  Send drawings to be quoted and questions to ncsales@n-c.com.
 

Technical Bulletins

Permeation of O-rings  (PDF)

Results of study comparing permeation from various O-ring materials, sealing surfaces and lubricants

O-ring Permeation Test Results  (PDF)

Details of O-ring permeation test results

Surface Treatment of Stainless Steel for Vacuum Use  (PDF)

Results of study comaring Ra values for several surface treatments with a without electropolish

Articles

REBECCA VTC February 2011  (PDF)

Nor-Cal contributes to breakthrough photoelectron spectroscopy instrument

Advertisements

Research End Station II  (PDF)

Nor-Cal Products provides vacuum components for angle resolved spectroscopy system

Flanges, Fittings & Adapters

Catalog Section

Nor-Cal Products Flanges, Fittings, and Accessories Catalog Section

(PDF - 17.9 MB)

This section of the catalog includes our selection of Flanges, Fittings, Hardware, Adapters, and Accessories. Click HERE to shop our online store.


Our flanges are made from 304 stainless steel material, which is specially processed to reduce impurities, grain size and microscopic leak paths. They are available in all commonly used high and ultra-high vacuum flange types, including ASA, NW (ISO-KF), ISO, CF and wire seal flanges. We also offer chain clamps and metal seals to convert a high vacuum NW flange to ultra-high vacuum.

Flange-to-Flange and Flange-to-Fitting Adapters
Nor-Cal Products provides a broad range of adapter fittings in order to connect two dissimilar types of components. They are made from 304 or 316L stainless steel and are TIG welded, cleaned and leak checked for vacuum service. Tube finishes are normally bead blasted. However, tumbled or electropolished finish can be provided upon request. Flanges and nipples used to adapt different sizes of the same flange type are called reducers. 

Weld Fittings
Fittings are available with or without flanges. Weld fittings (without flanges) are typically sold to mechanical contractors for use during the fit up phase of new fab construction. Nor-Cal Products provides a broad range of adapter fittings in order to connect two dissimilar types of components. They are made from 304 stainless steel and are TIG welded, cleaned and leak checked for vacuum service.

Flexhose, Couplings and PVC hose
Flexible stainless steel hoses are available in three thicknesses to accommodate many applications and bend radius requirements. Nor-Cal’s flexible couplings have more convolutions than comparable products, resulting in greater flexibility and lower spring rates. Plasticized PVC hoses can be used as a low cost rough vacuum line. 


304 & 316L Stainless Steel Tubing
Nor-Cal’s consumption of stainless steel tubing for its own products makes it possible to offer 304 and 316L stainless steel tubing in lengths up to 20 feet. 304 stainless steel tubing standard finishes are white pickled (Number 1 unpolished), bright annealed or polished OD and ID, depending on the size. 316L stainless steel tubing is offered with a bright annealed finish only. Bright annealed and polished tubing has been pickled and passivated. Polished tube can be described as No. 4 polished. The surface meets ASTM A270, and has received a 150 grit polish on the OD and 180 grit on the ID. Special cleaning, materials and surface finishes are available for an additional charge.

 

Product Bulletins

Assembly Instructions for Nor-Cal Conflat & Wire Seal Type Flanges  (PDF)

Describes assembly instructions for conflat & wire seal flanges

NW/KF Wing Nut Clamp Assembly Instructions  (PDF)

Results of study on clamp orientation and O-ring compression


 

Linear Gate Valve

Catalog Section

Nor-Cal Products Isolation Valves Catalog Section

(PDF - 10.7 MB)

This section of the catalog includes our selection of Linear Gate Valves. Click HERE to shop our online store.

Our linear gate valves have an ultra-slim profile, which makes them perfect for applications where space is limited, and their smaller volume results in lower outgassing and faster pumpdown. Larger sizes have a unique feature in the actuator, which dampens the vibration, which can arise when the gate is opened. This makes these valves ideal for semiconductor and other vibration sensitive processes.
 

Operator's Manual

Gate Valve Quick Start Guide  (PDF)

Describes standard installation instructions for linear gate valves

Gate Valve Operator's Manual  (PDF)

Condensed operation instructions for linear gate valves

Pendulum Valves

Operator's Manual

Intellisys Isolation Pendulum Valve Quick-Start Guide  (PDF)

Condensed isolation pendulum valve (IPV) operating instructions


 Documentation for Throttling Pendulum Valves is listed under Downstream Pressure Control.

Catalog Section

Nor-Cal Products Isolation Valves Catalog Section

(PDF - 10.7 MB)

This section of the catalog includes our selection of Pendulum Valves. Click HERE to shop our online store.

Nor-Cal Products’ pneumatically actuated isolation pendulum valves contain the same patented Penduroll mechanism that is found in the IntellisysTM throttling pendulum valves. These valves offer the user a highly reliable, compact and low cost alternative to competitive designs. In addition, the smooth actuation results in low particle generation and rapid open-to-close speeds.


Note: Documentation for Throttling Pendulum Valves is listed under Downstream Pressure Control.
 

Poppet Valves

Operator's Manual

Angle Valves Operator's Manual (PDF)

Operating instructions for air-to-open spring-to-close pneumatic poppet valves

N-Series Isolation Poppet Valves Operator's Manual (PDF)

Operating instructions for air-to-open spring-to-close pneumatic N-Series valves

N-Series Isolation Poppet Valves Quick Start Guide (PDF)

Condensed>N-Series Poppet Valve operating instructions

Catalog Section

Nor-Cal Products Isolation Poppet Valves Catalog Section

(PDF - 10.7 MB)

This section of the catalog includes our selection of standard Isolation Poppet Valves, N-Series, and replacement kits. Click HERE to shop our online store.

Our poppet valves are fully opening for high conductance and to prevent bellows contamination while the valve is in the open position, reducing particle contamination when the valve is cycled. Our bodies are die-formed from 304 stainless steel to eliminate sharp inside corners and improve conductance. The valves are electropolished for lower outgassing and better corrosion resistance. The welded bellows are made from AM-350 stainless steel to provide excellent corrosion resistance and flexibility. They are designed with additional segments to provide extended life.

 

Ball Valves

Catalog Section

Nor-Cal Products Ball Valves Catalog Section

(PDF - 10.7 MB)

This section of the catalog includes our selection of Ball Valves. Click HERE to shop our online store.

Ball valves are a low cost, manually or pneumatically operated, straight through isolation device. Their simple, robust design provides high reliability in “dirty” applications. They are commonly used on MOCVD and CVD equipment downstream from the chamber or vacuum pump to isolate traps or abatement tools. A stainless steel body and PTFE seat make these valves ideal for corrosive environments. Other applications include vacuum and other facilities requirements.

Operator's Manual

Ball Valve Quick Start Guide  (PDF)

Condensed operation instructions for linear gate valves

Manual Butterfly Valves

Catalog Section

Nor-Cal Products Manual Butterfly Valves Catalog Section

(PDF - 10.7 MB)

This section of the catalog includes our selection of Manual Butterfly Valves. Click HERE to shop our online store.

Our manual butterfly valves provide a low-cost alternative to bellows sealed gate valves. These valves easily actuate from the fully-closed position to fully open with only a quarter turn of the knob. A patented design allows the sealing disk to center itself when closing, with even pressure around the FKM O-ring seal. This design also helps to lower the amount of scuffing or rolling of the O-ring. Quarter-turn actuation, small footprint and the shortest possible gas path make manual butterfly valves the preferred choice for many applications.

All Metal & Leak Valves

Catalog Section

Nor-Cal Products All Metal and Leak Valves Catalog Section

(PDF - 10.7 MB)

This section of the catalog includes our selection of All Metal and Leak Valves. Click HERE to shop our online store.

Nor-Cal Products bakeable all-metal seal angle valves are intended for use in UHV or cryogenic applications where temperature extremes preclude the use of our elastomer seal valves. Approved for use in beamline facilities, these valves have a temperature operating range from -250°C to 400°C. Leak valves are used for controlling gas introduction into high and ultra-high vacuum systems. They utilize an optically flat sapphire poppet and a metal seal seat, allowing bakeout temperatures to 450ºC.

Operator's Manual

All Metal Valve  (PDF)

Section of product catalog covering all metal valves


 

Downstream Pressure Control

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Increased System Throughput through Faster Step Transitions  (PDF)

Article describing differentiating features of Intellisys downstream pressure control


 

Article

Increase Vacuum Processing Throughput and Yield Tech Bulletin  (PDF)

Paper describing differentiating features of Intellisys downstream pressure control.


 

Catalog Section

Nor-Cal Products Downstream Pressure Control Valves Catalog Section

(PDF - 8.1 MB)

This section of the catalog includes our selection of Downstream Pressure Control Valves. Click HERE to shop our online store.

Nor-Cal Products offers unequalled performance with IntellisysTM downstream pressure control products, providing measurable process benefits through higher resolution, speed and reliability. These benefits are the direct result of two core functions embedded in all Intellisys control systems.

Executable File

APC Monitor  (ZIP)

APC communications program (Please note that you should extract the zip file before installing.)


 
EDS Read Me (PDF)

EDS Read Me


 
IQD (EDS)

IQD


 
IQPlus (EDS)

IQPlus


 

Operator's Manual

Intellisys Adaptive Pressure Controllers Operator's Manual  (PDF)

Operating instructions for adaptive pressure controllers (APC)

LCD Front Panel Interface User Instructions  (PDF)

Addendum to APC operating instruction for LCD front panel interface

Intellisys TSS Operator's Manual  (PDF)

Operating instructions for throttling soft shut valve (TSS)

Intellisys Controller Quick-Start Guide  (PDF)

Condensed controller (APC) operating instructions

Intellisys Throttling Pendulum Valve Quick-Start Guide  (PDF)

Condensed throttling pendulum valve (TPV) operating instructions

Intellisys Throttling Butterfly Valve Quick-Start Guide  (PDF)

Condensed throttling butterfly valve (TBV) operating instructions

Intellisys Throttling Butterfly Valve Operator's Manual  (PDF)

Operating instructions for throttling butterfly valve (TBV)

Intellisys Throttling SoftShut Valve Quick-Start Guide  (PDF)

Condensed throttling soft shut valve (TSS) operating instructions

IQ+ Adaptive Pressure Controller Manual  (PDF)

Operating instructions for IQ+ controllers

CDG 025 OP Lit  (PDF)

Operating instructions for unheated capacitance diaphragm gauge (CDG)

CDG 045 OP Lit  (PDF)

Operating instructions for 45°C heated capacitance diaphragm gauge (CDG)

CDG 100 OP Lit  (PDF)

Operating instructions for 100°C heated capacitance diaphragm gauge (CDG)

CDG 160 OP Lit  (PDF)

Operating instructions for 160°C heated capacitance diaphragm gauge (CDG)

Product Bulletin

Throttling Pendulum Valve O-ring Replacement Instructions  (PDF)

Describes replacement procedure for pendulum valve O-rings


 
Pendulum Gate Valve Rebuild Procedure  (PDF)

Describes complete rebuild procedure for throttling pendulum valves (TPV)


 
IQD EDS (EDS) - Read Me File  (PDF)

EDS product codes for various Intellisys valves with IQD and IQ plus controllers


 
Intellisys Pin Assignments  (PDF)

Pin assignments for various Intellisys valves


 
APC Graphics Rev 3  (PDF)

Instuctions for uploading Nor-Cal APC communications program


 

Training Video

01-Introduction  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 1


 
02-Nor-Cal Tool Kit  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 2


 
03-Gate Disassembly  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 3


 
04-Grease and Rebuild the Gate Assembly  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 4


 
05-Replace the D-Seal O-ring  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 5


 
06-Removing the Case and Shaft  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 6


 
07-Rebuild the Shaft  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 7


 
08-Case Reassembly  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 8


 
09-Set the Gate Arm Height  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 9


 
10-Changing the Hard Stop  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 10


 
11-Reinstall the Gate Assembly  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 11


 
12-Speed, Cushions & Sensors  (WMV)

Describes rebuild procedure for throttling pendulum valves (TPV), part 12


 

Foreline Traps & Filters

Product Bulletin

Downstream Solutions Questionnaire (PDF)

Filling out this questionnaire will help determine which trap will work best for your application


 
Flex Trap Service Guidelines (PDF)

Describes disassembly and assembly procedure for foreline trap housing


 
Molecular Sieve Trap Service Guidelines (PDF)

Describes replacement procedure for Zeolite media in molecular sieve trap


 
TEOS Trap Service Guidelines (PDF)

Describes replacement of metal sieve and cleaning of TEOS trap


 
Water Trap Service Guidelines (PDF)

Describes disassembly and cleaning of water trap


 

Catalog Section

Nor-Cal Products Foreline Traps and Filters Catalog Section

(PDF - 8.5 MB)

This section of the catalog includes our selection of Foreline Traps and Filters. Click HERE to shop our online store.

These traps range in complexity from the sealed coaxial traps, which prevent oil backstreaming, to the triple-pass water cooled traps, which remove condensible gasses that contaminate mechanical pump oil or other parts of the system.

Product Flyer

MOCVD Trap (PDF)

Flyer for 3-stage MOCVD foreline trap


 

Thermal Products

Operator's Manual

SDC15 Controller User's Manual (PDF)

Operating instructions for single loop controller


 
SDC15 Controller Quick Reference Guide (PDF)

Condensed controller user's manual


 

Catalog Section

Nor-Cal Products Thermal Products Catalog Section

(PDF - 12.6 MB)

This section of the catalog includes our selection of Thermal Products. Click HERE to shop our online store.

Heater jackets, controllers and accessories reduce build-up of semiconductor process by-products in valves and other exhaust line components, while reducing particle generation and system downtime. Uniform line heating will minimize condensation and particle build-up in gas delivery and pump lines. Condensation and particle build-up will begin when temperatures and/or pressure falls below vapor phase.

Viewports, Shutters & Glass Adapters

Catalog Section

Nor-Cal Products Viewports, Shutters, and Glass Adapters Catalog Section

(PDF - 6.3 MB)

This section of the catalog includes our selection of Viewports, Shutters, and Glass Adapters. Click HERE to shop our online store.

Nor-Cal Products offers a complete line of viewports for vacuum chambers with NW, ISO and CF flanges. CF flanged viewports are available with fully annealed borosilicate glass or fused silica. Weld stub viewports are available for welding onto new or existing chambers. Special materials and coatings, such as sapphire and anti-reflective (AR) coating, are available on request. Glass provides a large distortion free viewing area at low cost. Quartz and fused silica provide superior ultraviolet radiation transmission and resistance to thermal shock.

Vacuum Chambers

Catalog Section

Nor-Cal Products Chambers and Weldments Catalog Section

(PDF - 9.5 MB)

This section of the catalog includes our selection of Chambers and Weldments. Click HERE to shop our online store.

Nor-Cal Products has earned a reputation as a premier global manufacturer of high and ultra-high vacuum chambers. The quality, appearance and performance of our chambers are unequaled. We supply single chambers designed from customer specifications for university or national laboratory research projects, as well as production quantity chambers that are built-to-print for equipment manufacturers.

Advertisement

Research End Station I (PDF)

Nor-Cal provides vacuum chambers for rotary vacuum system


 

Feedthroughs

Catalog Section

Nor-Cal Products Liquid and Electrical Feedthroughs Catalog Section

(PDF - 6.4 MB)

This section of the catalog includes our selection of Liquid and Electrical Feedthroughs. Click HERE to shop our online store.

Nor-Cal Products’ line of liquid and liquid nitrogen feedthroughs includes the most commonly required for medium, high and ultra-high vacuum applications. Tubing is .25 and .375 (6.35 and 9.53mm) inch OD, 304 stainless steel with CF or NW flanges. They are available without fittings or terminated with industry standard Swagelok or Cajon VCR fittings. Maximum bakeout with CF flanges is 450ºC and 200ºC with NWs. Vacuum ranges are 10-10 mbar and 10-8, respectively.

Motion Transfer

Operator's Manual

ALM-133/275/PNM Series Linear Feedthroughs (PDF)

Operating instructions for pnuematic linear motion feedthrough


 
MLR-MLRC Series (PDF)

Operating instructions for magnetic linear rotary feedthrough


 
PMXYZ Series Precsion Manipulator (PDF)

Operating instructions for 100 series XYZ precision manipulator


 
Precision Manipulators Version 1.5 (PDF)

Operating instructions for 200 series XYZ precision manipulator


 
RS Series Differentially Pumped Rotary Platforms (PDF)

Operating instructions for differentially pumped rotary seals


 
STS-TTC Sample Platen (PDF)

Operating instructions for sample transfer system


 

Catalog Section

Nor-Cal Products Sample Transfer and Manipulation Catalog Section

(PDF - 9.2 MB)

This section of the catalog includes our selection of Sample Transfer and Manipulation products. Click HERE to shop our online store.

Nor-Cal Products offers the researcher complimentary devices for sample transfer and positioning in ultra-high vacuum systems. Combined with our vacuum chambers, load locks, gate valves, all-metal valves, feedthroughs, viewports, frames and roughing accessories, we can provide a complete turn-key research system. Each standard component can readily be customized to meet specific requirements, such as sample heating and cooling, special lengths, or stepper motor drivers. Our sample transfer and manipulation devices are made from the highest quality materials and lubricants to withstand repeated UHV bakeouts.

Product Bulletin

Sample Transfer & Manipulation Terminology (PDF)

Definitions of terms used for sample transfer devices and motions


 

Thin Film Deposition

Catalog Section

Nor-Cal Products Thin Film Deposition Catalog Section

(PDF - 6.7 MB)

This section of the catalog includes our selection of Thin Film and Deposition products. Click HERE to shop our online store.

Nor-Cal Products offers an extensive selection of commonly used quartz crystal feedthroughs, sensors and multi-channel monitors, cables, quartz crystals, accessories and replacement parts for use in semiconductor, optical and industrial thermal deposition processes. Custom feedthroughs are available with a variety of flanges in all sizes.