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Viewport Shutters

Viewport shutters are normally installed on a vacuum chamber CF flange behind a viewport. The shutter serves to shield the viewport surface and prevent the build-up of deposition materials. The shutter plate opens a full 90 degrees by rotating the supplied all metal rotary motion feedthrough and may be locked in position with a locking screw. 
  • 304 SS flange material
  • CF flanges sizes available 2.75" CF -8" CF
  • Maximum bakeout temperature 150 degrees C
  • 10(-10) torr vacuum range
Nor-Cal Products offers a complete line of viewports for vacuum chambers with NW, ISO and CF flanges. CF flanged viewports are available with fully annealed 7056 glass or fused quartz. Special materials and coatings, such as sapphire and anti-reflective (AR) coating, are available on request. Glass provides a large distortion free viewing area at low cost. Quartz provides superior ultraviolet radiation transmission and resistance to thermal shock. Glass CF flanged viewports can withstand repeated bakeout cycles to 400°C and vacuum pressures to 10-11 Torr. Quartz CF flanged viewports should not be baked above 200°C. NW and ISO flanged viewports can withstand 200°C bakeouts and pressures to 10-9 Torr. Viewport shutters are mounted behind a viewport to prevent build-up of deposition materials on viewports while in the closed position. They use a single plate shutter with a 90º opening rotation. Nor-Cal Products’ design completely shields the viewing glass when the shutter is in the closed position. An integrated PRM-133 rotary motion feedthrough provides smooth actuation and a positive locking screw. Please call for custom actuation options, such as motor drives or special flanges. Glass adapters are available in 7740 Borosilicate glass and 7052 glass, and supplied with NW, CF or ISO flanges. These adapters are useful for mounting glass accessories to metal high vacuum systems, or to attach flange mounted components to glass systems. 

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