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Loadlock Vacuum Chambers

Nor-Cal Products, Inc. load lock chambers are provided with a six inch CF flange for mounting to the gate valve, a six inch Add-A-Door with 7056 glass viewport, a 2.75 inch CF flange for attachment of the linear feedthrough, and two 2.75 inch CF flanges for pumping. Standard finish is electropolished. Custom sizes can be supplied upon request. 
  • 304 SS materials
  • Viton o-ring door seal
  • Temperature range -20 degrees C to 200 degrees C
  • Electropolish finish
  • 7056 glass viewport door
  • Custom versions available
Nor-Cal Products has earned a reputation as a world-class manufacturer of high and ultra-high vacuum chambers. The quality, appearance and performance of our chambers are unequaled. We supply single chambers designed from customer specifications for university or national laboratory research projects, as well as production quantity chambers that are built-to-print for equipment manufacturers. Semiconductor, thin-film deposition and compound semiconductor processing are common applications for our high-vacuum, O-ring sealed chambers that operate at pressures down to 1x10-9 Torr. Vacuum fired 316L stainless steel, electropolishing and metal seals are recommended for ultra-high vacuum surface science chambers that operate at pressures in the 1x10-11 Torr range. Nor-Cal Products can fabricate vacuum chambers in a wide range of shapes and sizes with doors, stands, water jackets and Mumetal shields. Please consult our Product Managers for exact capabilities. We offer a complete line of vacuum chamber accessories that include load locks, sample transfer and positioning devices, liquid and electrical feedthroughs, viewports and roughing components. 

Nor-Cal Products Guide to Custom Chambers and Weldments

 

Drawings may be e-mailed direct to our engineering department at ncsales@n-c.com

 

Click here to Request a Quote.

 

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