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GEC Reference Cells

Nor-Cal Products has a well earned reputation as a world-class manufacturer of UHV chambers and systems. Our design & manufacturing expertise makes Nor-Cal your best choice to help meet your specific needs for GEC Reference Cell components. The design for this reference chamber was developed at the 1988 Gaseous Electronics Conference (GEC) for research projects utilizing 13.56 MHz radio-frequencies (RF). The reference cell concept grew out of a need to provide an experimental platform for comparing plasma measurements carried out in a number of separate but identical chambers. Its basic purpose is to establish the necessary conditions defining reproducible plasma parameters that in turn allow the researcher to establish a reference RF-excited plasma enabling him to define and calibrate diagnostic measurements and theoretical models. Since the reference cell’s inception, Nor-Cal Products has worked with Sandia National Lab’s design team in order to streamline its design and to offer standard options requested by various research groups. At present, the cell is a conventional ultrahigh vacuum (UHV) chamber with a pair of 10 cm diameter, parallel plate electrodes with a variety of system components. 
Nor-Cal Products has earned a reputation as a world-class manufacturer of high and ultra-high vacuum chambers. The quality, appearance and performance of our chambers are unequaled. We supply single chambers designed from customer specifications for university or national laboratory research projects, as well as production quantity chambers that are built-to-print for equipment manufacturers. Semiconductor, thin-film deposition and compound semiconductor processing are common applications for our high-vacuum, O-ring sealed chambers that operate at pressures down to 1x10-9 Torr. Vacuum fired 316L stainless steel, electropolishing and metal seals are recommended for ultra-high vacuum surface science chambers that operate at pressures in the 1x10-11 Torr range. Nor-Cal can fabricate vacuum chambers in a wide range of shapes and sizes with doors, stands, water jackets and Mumetal shields. Please consult our Product Managers for exact capabilities. We offer a complete line of vacuum chamber accessories that include load locks, sample transfer and positioning devices, liquid and electrical feedthroughs, viewports and roughing components. 

Nor-Cal Products Guide to Custom Chambers and Weldments

 

Drawings may be e-mailed direct to our engineering department at ncsales@n-c.com

 

Click here to Request a Quote.

 

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