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Custom Stainless Steel Vacuum Chambers

Nor-Cal Products uses the most up-to-date equipment and procedures for the inspection of vacuum chambers. Every weld is leak checked with a helium mass spectrometer to insure leak rates of 1x10-9 mbar l/sec. or less. Mechanical inspection is accomplished with a coordinate measuring machine (CMM). We can provide our customers with CMM inspection reports of their chambers on request.  Our chamber qualification and test equipment is available to customers for an additional fee who request residual gas analysis (RGA) scans and leak checks of their chamber after vacuum baking. The test equipment includes vacuum pumps, gauges, RGA, quartz heaters, nitrogen back fill and a leak detector. Chamber bake out is achieved with high intensity infrared radiant lamps that are strategically placed throughout the chamber. Baking under vacuum removes high and low molecular weight volatile compounds. Non-water cooled UHV chambers are typically baked for at least 24 hours at 150˚C. (The maximum temperature of system components such as seals, chamber materials, valves, etc. may limit maximum baking temperatures.) Uniform bakeout temperature is achieved by wrapping the associated system components in high temperature fiberglass materials. After cool down our RGA will provide partial pressure data, determining the level of residual volatile compounds. Typical scans produce atomic mass levels below 1x10-9 mbar for atomic masses greater than or equal to 44. Total system pressures are between 5x10-9 and 7x10-10 mbar. Chamber design, seals and pumps used, and the maximum bake temperature over time effect the residual gas composition and ultimate pressures reached. Following chamber scanning, chambers are leak tested using a NIST traceable helium mass spectrometer leak detector with a final allowable leak rate of 1x10-10 mbar l/sec. or less.
Chamber Material:
     304SS, 304LSS, 316SS, 316LSS, aluminum, etc. 
Vacuum Level:
     Base pressure and acceptable leak rate   
Surface treatment:
     Glass bead finish, electropolish, chemical clean, etc.   
Special Requirements:
     Vacuum bakeout, vacuum fire or RGA scan.   
Additional Hardware:
     Blank-off flanges, manipulators, viewports, etc.   
Required Inspection Reports:
     CMM inspection report or certificate of conformance and/or material certificates.
Nor-Cal Products has earned a reputation as a world-class manufacturer of high and ultra-high vacuum chambers. The quality, appearance and performance of our chambers are unequaled. We supply single chambers designed from customer specifications for university or national laboratory research projects, as well as production quantity chambers that are built-to-print for equipment manufacturers. Semiconductor, thin-film deposition and compound semiconductor processing are common applications for our high-vacuum, O-ring sealed chambers that operate at pressures down to 1x10-9 Torr. Vacuum fired 316L stainless steel, electropolishing and metal seals are recommended for ultra-high vacuum surface science chambers that operate at pressures in the 1x10-11 Torr range. Nor-Cal Products can fabricate vacuum chambers in a wide range of shapes and sizes with doors, stands, water jackets and Mumetal shields. Please consult our Product Managers for exact capabilities. We offer a complete line of vacuum chamber accessories that include load locks, sample transfer and positioning devices, liquid and electrical feedthroughs, viewports and roughing components.

Nor-Cal Products Guide to Custom Chambers and Weldments

 

Drawings may be e-mailed direct to our engineering department at ncsales@n-c.com

 

Click here to Request a Quote.

 

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