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Poppet Valves With Softstart

For reduced particle contamination in load locks and process chambers, Genesis valves can be provided with a patented low cost soft start actuator with no increase in valve size. A double-acting air piston opens a soft start circuit inside the valve when air is supplied to the top of the air cylinder. The soft start bypass opening can be provided fully open or with a specified orifice, depending on the desired pump down. After the chamber has been pumped from atmosphere to the desired cross over pressure, the main valve circuit is opened by supplying air to the bottom of the air cylinder. Each circuit can be operated independently and is air-to-open, spring-to-close. 
  • Beryllium Copper connectors with SS hardware (where applicable) Sold in packages of 10 pieces
Our poppet valves are fully opening for high conductance and to prevent bellows contamination while the valve is in the open position, reducing particle contamination when the valve is cycled. Die-formed, 304 stainless steel bodies eliminate sharp inside corners and improve conductance. The valves are electropolished for lower outgassing and better corrosion resistance. The welded bellows are made from AM-350 stainless steel to provide excellent corrosion resistance and flexibility. They are designed with additional segments to provide extended life. 

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