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Two Stage LPCVD TEOS Traps

The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our dual stage trap contains a stainless steel gauze filter and a 10 micron particulate filter allowing solids to form inside the trap and preventing the small particles from moving down line. It will also capture and hold a small amount of liquid. 
  • Right angle or coaxial design
  • First stage - Stainless steel gauze filter
  • Second stage - 10 micron fiberglass filter
  • Limited reservoir to collect liquid TEOS
  • Collects particles >10 microns
  • Easy filter replacement
Since 1962, Nor-Cal Products has been designing and building standard and custom foreline traps for the vacuum industry. These traps range in complexity from the sealed coaxial traps, which prevent oil backstreaming, to the triple-pass water cooled traps, which remove condensable gasses that contaminate mechanical pump oil or other parts of the system. All traps disassemble easily with a FKM O-ring and V-clamp, with the exception of our sealed coaxial metal sieve traps which have a one piece body. The two piece body allows for easy removal for cleaning or replacement. Standard finish for all traps is beadblast. Electropolish finish is available on request. 

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