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Three Stage LPCVD TEOS Traps

The LPCVD-TEOS trap is designed specifically to meet the demanding requirements of this process. Our three stage trap contains a stainless steel gauze filter, a 10 micron particulate filter and a generous liquid reservoir. This allowing solids to form, prevents small particles from moving down line, and holds large amounts of liquid. 
  • Right angle or coaxial design
  • First stage - Stainless steel gauze filter
  • Second stage - 10 micron fiberglass filter
  • Third stage - Large reservoir to collect any liquid TEOS
  • Collects particles >10 microns
  • Easy filter replacement
Since 1962, Nor-Cal Products has been designing and building standard and custom foreline traps for the vacuum industry. These traps range in complexity from the sealed coaxial traps, which prevent oil backstreaming, to the triple-pass water cooled traps, which remove condensable gasses that contaminate mechanical pump oil or other parts of the system. All traps disassemble easily with a FKM O-ring and V-clamp, with the exception of our sealed coaxial metal sieve traps which have a one piece body. The two piece body allows for easy removal for cleaning or replacement. Standard finish for all traps is beadblast. Electropolish finish is available on request. 

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