Loading Shopping Cart
Loading shopping cart. Please wait.


RGA test stand enables Ultra-Clean Vacuum components

UCV-Testing.jpgNor-Cal Products is one of a small handful of companies in the world that can precisely measure outgassing rates of a wide range of atomic mass units (AMU’s) from 1-200 using a highly precise, state-of-the-art RGA test stand. New generation EUV photolithography tools are very sensitive to the presence of both water and hydrocarbons, and they demand consistent cleanliness levels which can only be measured through these non-conventional means.

Periodic defect analysis results in process improvements with narrower acceptable limits on subsequent production runs.  Our quality system is ISO certified, SSQA certified and MIL-Q-9858 and MIL-I-45208 compliant. Every weld is leak checked with a helium mass spectrometer to insure a leak rate of 1x10-9 mbar ls-1  He or less.  Our chamber qualification test benches, which contain vacuum pumps, gauges, RGA, quartz heaters, nitrogen back fill and a leak detector are used on components requiring lower leak rates.  Once water and other background are eliminated by the 150°C bakeout, we can provide customized scans to detect the slightest contamination enabling us to attain the highest possible cleanliness for your application.



At Nor-Cal Products, nearly all custom weldments and vacuum chambers receive a final coordinate measuring machine (CMM) inspection to confirm that port lengths, flange centerlines, theoretical targets and other features are within dimensional tolerances.  A portable CMM, with a 2.5 meter reach, is used  to perform in-process inspections of large chambers while still on the machining center.  This increases machine center utilization and eliminates manufacturing bottlenecks. 



Recent Articles

07/27/2020  –  Custom Chambers and Capabilities

07/17/2020  –  Pfeiffer Vacuum - Shaping the vacuum industry since 1890

03/24/2020  –  As an essential business for Healthcare, Defense, and Microelectronics, Nor-Cal remains open

02/06/2020  –  Improve surface finishes with our in-house cleaning capabilities

01/30/2020  –  Halo Collimators a perfect example of highly configured vacuum solutions

01/30/2020  –  Solve system challenges with our robust isolation valves

01/30/2020  –  RGA test stand enables Ultra-Clean Vacuum components

12/05/2019  –  Ball Valves offer high reliability in tough applications

12/02/2019  –  Achieve Maximum Dynamic Range with the NEW J-Lock Seal for Intellisys IQ+ Throttle Valves

10/10/2019  –  Nor-Cal Products featured on national television

07/19/2019  –  Decrease process downtime with Nor-Cal Products Foreline Traps

03/12/2019  –  Enabling Components for Emerging Technologies

03/08/2019  –  Nor-Cal Products - A Partner to Industry and Research

01/17/2019  –  Innovative 3-Position Pendulum Valve provides accurate, repeatable pressure control

01/04/2019  –  Thin Film Deposition Components and Supplies

11/02/2018  –  Pfeiffer Vacuum opens new facility in Nashua, New Hampshire

10/10/2018  –  Pfeiffer Vacuum Opens New High-Tech Production Site In Romania

04/09/2018  –  Nor-Cal Products is a Special Sponsor at IPAC '18

02/14/2018  –  Nor-Cal Products is ASME BPV U Stamp Certified

07/20/2017  –  Nor-Cal Products, Inc. is now a division of Pfeiffer Vacuum Technology AG

06/09/2017  –  Smart Starts at Nor-Cal Products - The Vacuum Experts - Booth 5556

04/26/2017  –  Semicon & FPD China - Unprecedented growth in region

04/26/2017  –  Nor-Cal Products Korea celebrates a decade of innovation and excellence

02/01/2017  –  Butterfly Valve Redefines High Temperature Pressure Control

01/09/2017  –  CleanBlu© High-Temp Cloth Heater Jackets offer energy efficient process control

07/20/2016  –  2016 Rocky Mountain AVS Symposium

07/09/2016  –  Harsh Process Valve

12/14/2015  –  Visit Nor-Cal Products at Semicon West - Booth 1105

02/10/2015  –  EtherCAT

10/01/2014  –  Breast Cancer Awareness Week

09/01/2013  –  Nor-Cal Europe’s new web site

08/01/2013  –  Aluminum Vacuum Chambers

04/01/2013  –  GEC Cell in Moscow

12/16/2011  –  Nor-Cal Vietnam Receives ISO-9000 Quality Certification

04/10/2011  –  Energy Efficient Lighting

02/01/2011  –  Craig Hill Youth Activity Center

02/01/2011  –  REBECCA