RGA test stand enables Ultra-Clean Vacuum components
Nor-Cal Products is one of a small handful of companies in the world that can precisely measure outgassing rates of a wide range of atomic mass units (AMU’s) from 1-200 using a highly precise, state-of-the-art RGA test stand. New generation EUV photolithography tools are very sensitive to the presence of both water and hydrocarbons, and they demand consistent cleanliness levels which can only be measured through these non-conventional means.
Periodic defect analysis results in process improvements with narrower acceptable limits on subsequent production runs. Our quality system is ISO certified, SSQA certified and MIL-Q-9858 and MIL-I-45208 compliant. Every weld is leak checked with a helium mass spectrometer to insure a leak rate of 1x10-9 mbar ls-1 He or less. Our chamber qualification test benches, which contain vacuum pumps, gauges, RGA, quartz heaters, nitrogen back fill and a leak detector are used on components requiring lower leak rates. Once water and other background are eliminated by the 150°C bakeout, we can provide customized scans to detect the slightest contamination enabling us to attain the highest possible cleanliness for your application.
At Nor-Cal Products, nearly all custom weldments and vacuum chambers receive a final coordinate measuring machine (CMM) inspection to confirm that port lengths, flange centerlines, theoretical targets and other features are within dimensional tolerances. A portable CMM, with a 2.5 meter reach, is used to perform in-process inspections of large chambers while still on the machining center. This increases machine center utilization and eliminates manufacturing bottlenecks.