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Gain Control with Nor-Cal Products Isolation & Pressure Control Valves

Gain Control with Nor-Cal Products' Isolation and Pressure Control Valves

 

Since 1962, Nor-Cal Products has continuously improved valve design and expanded our product line in order to offer valves for almost every vacuum application. Our valves provide outstanding performance in the most demanding applications, such as semiconductor and compound semiconductor processing. 

 

Isolation Valves

Nor-Cal Products offers vacuum isolation valves for a broad range of sizes, pressures and applications. Our pneumatically actuated poppet valves are standard on semiconductor equipment because of their robust design and edge-welded AM 350 stainless steel bellows, which provide full-opening conductance. Copper seal bonnet and manual all-metal valves are available for UHV applications.

N-Series and Genesis modular valves were designed specifically for semiconductor equipment that require million-cycle reliability, small footprint and low-cost soft start and heating options. Additionally, Nor-Cal provides traditional linear as well as low-particulate pendulum style gate valves for isolation of high vacuum pumps and UHV chambers. We also offer a selection of leak valves, manual butterfly valves and pneumatic and manual ball valves.

 


 

Pressure Control Valves

Nor-Cal Products offers unequalled performance with Intellisys downstream pressure control products, providing measurable process benefits through higher resolution, speed and reliability. 

IntellisysTM adaptive pressure controllers and throttle valves reduce time to pressure set-point, while increasing tool throughput with more than 1,000,000 control resolution steps and a 20-times valve speed increase.  Sealing and non-sealing butterfly valves are available with or without on-board control.

Throttling pendulum valves provide unequalled pressure control as well as isolation for large bore high vacuum pumps. Heated and unheated capacitance diaphragm gauges and heater jackets are also available as options.

Shop Nor-Cal Products Pressure Control Valves

 


 

Increase Vacuum Processing Throughput and Yield (PDF)
This paper describes the differentiating features of Nor-Cal Products IntellisysTM downstream pressure control components and devices

Recent Articles

07/20/2017  –  Nor-Cal Products, Inc. is now a division of Pfeiffer Vacuum Technology AG

07/07/2017  –  Achieve Maximum Dynamic Range with the NEW J-Lock Seal for Intellisys IQ+ Throttle Valves

06/09/2017  –  Smart Starts at Nor-Cal Products - The Vacuum Experts - Booth 5556

05/03/2017  –  Nor-Cal Products - A Partner to Industry and Research

04/26/2017  –  Semicon & FPD China - Unprecedented growth in region

04/26/2017  –  Nor-Cal Products Korea celebrates a decade of innovation and excellence

03/05/2017  –  Ball Valves offer high reliability in tough applications

02/27/2017  –  Innovative 3-Position Pendulum Valve provides accurate, repeatable pressure control

02/09/2017  –  Custom Chambers and Capabilities

02/06/2017  –  Nor-Cal Products is ASME BPV U Stamp Certified

02/01/2017  –  Butterfly Valve Redefines High Temperature Pressure Control

01/09/2017  –  CleanBlu© High-Temp Cloth Heater Jackets offer energy efficient process control

01/01/2017  –  RGA test stand enables Ultra-Clean Vacuum components

11/10/2016  –  Decrease process downtime with Nor-Cal Products Foreline Traps

09/19/2016  –  Gain Control with Nor-Cal Products Isolation & Pressure Control Valves

07/20/2016  –  2016 Rocky Mountain AVS Symposium

07/09/2016  –  Harsh Process Valve

12/14/2015  –  Visit Nor-Cal Products at Semicon West - Booth 1105

02/10/2015  –  Thin Film Deposition

02/10/2015  –  EtherCAT

10/01/2014  –  Breast Cancer Awareness Week

09/01/2013  –  Nor-Cal Europe’s new web site

08/01/2013  –  Aluminum Vacuum Chambers

04/01/2013  –  GEC Cell in Moscow

12/16/2011  –  Nor-Cal Vietnam Receives ISO-9000 Quality Certification

04/10/2011  –  Energy Efficient Lighting

02/01/2011  –  Craig Hill Youth Activity Center

02/01/2011  –  REBECCA