Harsh Process Valve
The Harsh Process Valve (HPV) from Nor-Cal Products offers best-in-class vacuum system sealing in the toughest applications. Process by-product generated in many CVD and ALD, as well as furnace reactors, have a tendency to coat downstream components. In the case of standard linear gate valves, this negatively affects the operation of moving parts such as bearings, linkages and roller guide tracks to the point where the valves can freeze up.
The HPV's simple and robust design contains no moving parts, except the wedge shaped gate itself. It closes and seals by use of dual O-rings – one on either side of the gate – that are compressed with high force from the pneumatic or manual actuator. High temperatures, an abundance of by-product, process O-ring degradation – none of it matters. The HPV is designed to perform, up to temperatures of 200°C.
To facilitate cleaning and servicing of the valve, the HPV features a split body design that separates allowing the entire actuator and gate/shaft assembly to then be removed for decontamination and quick in-situ servicing. The valve body stays in the vacuum foreline and its smooth and easy-to-access internal surfaces make wipe-out and clean-up fast and easy.
Available in five sizes with four different flange types, there is an HPV configuration to fit just about every system.
Harsh Process Valve Series Specifications Sheet