High-Vacuum Products for Research and Industry

Chamber Experts

From our 85,000 square foot, ISO certified facility, we supply one-off chambers designed from customer specifications for university or national laboratory research projects, as well as production quantity chambers that are built-to-print for equipment manufacturers. Thin-film deposition and compound semiconductor processing are common applications for our high-vacuum, o-ring sealed chambers that commonly operate at pressures down to 1x10-9 Torr. Water-cooled chamber walls and flanges are commonly provided for high temperature applications, such as MOCVD. Metal seals are recommended for ultrahigh vacuum surface science chambers that operate at pressures in the 1x10-11 Torr range.

In-house electropolishing improves the vacuum performance of 304 stainless steel as well as vacuum fired 316L material for XUHV applications. Nor-Cal can provide cylindrical and rectangular chambers up to about five foot square with doors, stands or Mumetal shields. (Consult the factory for exact capabilities.)