Product News

Aluminum Chambers

Nor-Cal manufactures welded ultra-high vacuum aluminum chambers, providing several advantages including low material cost, light weight, high thermal conductivity, low nuclear activation, low magnetic permeability. E-mail prints@n-c.com for an estimate. Or we will design an aluminum chamber to meet your specifications and provide all the components to complete your system.

Chamber Experts

From our 85,000 square foot, ISO certified facility, we supply one-off chambers designed from customer specifications for university or national laboratory research projects, as well as production quantity chambers that are built-to-print for equipment manufacturers. Thin-film deposition and compound semiconductor processing are common applications for our high-vacuum, o-ring sealed chambers that commonly operate at pressures down to 1x10-9 Torr. Water-cooled chamber walls and flanges are commonly provided for high temperature applications, such as MOCVD. Metal seals are recommended for ultrahigh vacuum surface science chambers that operate at pressures in the 1x10-11 Torr range.

In-house electropolishing improves the vacuum performance of 304 stainless steel as well as vacuum fired 316L material for XUHV applications. Nor-Cal can provide cylindrical and rectangular chambers up to about five foot square with doors, stands or Mumetal shields. (Consult the factory for exact capabilities.)

Vacuum Valves In Stock!

Why wait months for a vacuum gate valve when Nor-Cal can ship today? We stock the most frequently used sizes and flange configurations of linear gate valves with pneumatic and manual actuators. We also can ship the most commonly used models of poppet valves and ball valves from stock to two weeks. IQ+ Intellisys™ throttling butterfly and pendulum valves can be configured for your particular application in just a few weeks. Call your Nor-Cal representative to obtain a lead time for your particular valve.

REBECCA – A New Paradigm in Photoelectron Spectroscopy

Scientific research instruments and industrial vacuum equipment are often viewed as just a means to an end. In some instances, however, they provide the platform enabling science and industry to rapidly expand their boundaries beyond current capabilities. REBECCA represents such an achievement. Download the complete article reprinted by permission from the February, 2011 issue of Vacuum Technology & Coating Magazine. http://www.vtcmag.com

Nor-Cal Lowers Prices!

Our new year’s resolution to you is to offer the highest quality 304 ss Conflat vacuum flanges at the lowest prices. We have reduced some items by more than 35%. Our CF flanges have been providing UHV researchers and equipment manufacturers the highest level of vacuum integrity and cleanliness for fifty years. We stock sizes from 3/4 to 12 inch IDs in several styles, including blank, bored, rotatable and tapped with inch or metric threads. See the Conflat section of our on-line catalog to place your order today!

N-Series Poppet Valves

Nor-Cal Products’ new N-Series vacuum isolation valves provide equipment manufacturers the most compact footprint available with a three million cycle MTBF. A bellows-sealed stem and electropolished stainless steel body provide long life, even in the most demanding applications. Standard pneumatic actuation is normally closed. N-series valves are available in right angle or angle-in-line body styles with tube ends, NW flanges and CF rotatable flanges. Optional air solenoids are available in multiple voltages and can be ordered factory installed or as separate kits for easy field installation.

Pneumatic and Manual Ball Valves

Nor-Cal Products’ new vacuum ball valves are a low cost, manually or pneumatically operated, straight through isolation device. Their simple, robust design provides high reliability in "dirty" applications. They are commonly used on MOCVD and CVD equipment downstream from the chamber or vacuum pump to isolate traps or abatement tools. A stainless steel body and Teflon seat make these valves ideal for corrosive environments. A quarter turn of the handle quickly switches the valve from open to close. They are available with NW-16 through NW-50 flanges as standards. Heater jackets are available to reduce process by-product accumulation.

IQ+ Downstream Pressure Control Valves

Responding to emerging industry requirements, Nor-Cal now has a fully RoHS compliant and DeviceNet certified adaptive pressure controller. It is similar in function and appearance to the earlier line of IQ-controllers, but features a much advanced pressure control algorithm for improved control during difficult conditions. Nor-Cal's new IQ+ controller is available on the complete line of regular and sealing Throttling Butterfly Valves as well as Throttling Pendulum Valves, turning what is very good performance into best-in-class process control. The IQ+ controller is an on-valve integral control & drive unit that is fully RoHS compliant with 100% lead-free circuit board content. User interfaces include an ODVA certified DeviceNet protocol and physical layer, as well as standard RS-232 communications. Gauge power capabilities have been upgraded to a full 1500 mA at +/- 15 VDC in order to power two heated CDG's directly from the IQ+ unit. In addition, a battery backup feature is available that can be used to bring the valve to a fail-closed or fail-open safe position in the event of system power loss. Last, the IQ+ adaptive pressure control algorithm has been significantly improved to better deal with difficult control situations, in particular at conditions that typically occur at low pressures and low flows.

For larger system pressure control requiring multiple pumps and forelines, such as on flat panel, industrial coating or photovoltaic tools, it is easily possible to gang up to ten valves together. Multi-valve Master/ Slave system control like this is facilitated via the Nor-Cal-Net intervalve communications system. One IQ+ operated valve serves as the master with communications to the host tool, gauge input and has direct command over the control position of the remaining slave valves. The IQ+ controlled butterfly valves are the right answer to any new or challenging pressure control application.

New CDG Products

Nor-Cal’s line of Capacitance Diaphragm Gauges offer economical and highly accurate manometers for superior performance in various environments and set new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.

The CMG-025-series of economical miniature manometers is designed for stable performance in manufacturing tool environments. The corrosion resistant Inconel sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation.

The CDG025-series of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one push button zero function and set point adjustment. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation.

The CDG045-series manometers are your best choice for high accurate total pressure measurement and control.

CDG100-series gauges are temperature controlled at 100°C for superior performance in demanding semiconductor and plasma processes.

CDG160-series gauges are temperature controlled at 160°C for superior signal stability and repeatability.

Whatever the application, Nor-Cal can assist in getting the right gauge for your needs.